Atomic Force Microscope (AFM)

Atomic Force Microscope (AFM) is a characterization system using which we can do surface imaging of different materials up to nanometer accuracy.

Features:

  • Modes available: Contact / Non-contact

  • Scanners: 10um x 10um / 100um x 100um (Maximum scan area)

  • Resolution: Atomic resolution

  • Substrates preferred: Usually 2" and 4" wafers used in fab processes / Glass cover slips. Thicker samples should be avoided to minimize the damage of the tips.

  • Substrate size: Around 1cm x 1cm

Applications:

  • Surface imaging, mechanical characterization of MEMS devices such as micro-cantilevers, etc.